Low-Temperature Large-Target Magnetron Sputtering PVD Coater Equipment For SEM Preparation

Low-Temperature Large-Target Magnetron Sputtering PVD Coater Equipment For SEM Preparation

Model:  TMAX-HZ-JS02-Low-Temperature SEM Preparation

Key Features & Applications

The  TMAX-HZ-JS02 Magnetron Sputtering System integrates advanced vacuum technology with intelligent automation, delivering high uniformity, efficiency, and versatility for precision thin-film deposition. Its large-target design and planar magnetron cathode minimize plasma-induced thermal damage, making it ideal for temperature-sensitive samples (e.g., polymers, fibers, biological specimens) and high-resolution SEM preparation.

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Technical Parameters

Category	Specifications
Dimensions	530 × 300 × 320 mm
Input Voltage	100–250 VAC, 50/60 Hz
Sputtering Voltage	300–600 V (DC)
Target Material	Ø50 × 0.1 mm (Au, Pt, Ag, Pd, etc.)
Control Mode	5-inch touchscreen (ARM architecture, bilingual UI)
Power Consumption	100 W
Sputtering Current	10–50 mA (1 mA precision)
Sputtering Time	0–600 s (1 s step)
Working Vacuum	2–10 Pa (0.1 Pa resolution)
Ultimate Vacuum	<1 Pa
Vacuum Measurement	Full-range Pirani gauge
Chamber Size	Ø160 × 120 mm
Sample Stage	Ø80–100 mm (holds 12 standard stubs)
Protections	Overcurrent, vacuum safety

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System Components

1. Sputtering Source: Planar magnetron cathode for Au/Pt/Pd/Ag deposition.

2. Power Supply: Constant-current DC (300–600 V, ±1 mA precision).

3. Vacuum System: Rotary vane pump (<1 Pa), Pirani monitoring.

4. Automation: One-touch operation with parameter memory.

5. Data Display: Real-time curves for current, voltage, and vacuum status.

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Advantages

· Nano-scale Coating: Particle size <5 nm, ideal for high-resolution SEM.

· Low Thermal Impact: Magnetron technology reduces sample heating.

· High Throughput: 12-sample capacity with auto-rotation for uniformity.

· Plug-and-Play: No specialized training required.

Ideal for: Material science, biology, and conductive/thermal enhancement of non-metallic samples.

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Operation Notes

· Target Replacement: Tool-free design with shielded ring mechanism.

· Maintenance: Oil-lubricated pump (included) with visual oil-level window.

· Gas Connection: Supports Ar/N₂ or ambient air (6 mm OD tubing).