High Vacuum RF+DC Magnetron Ion Sputtering Coater Coating Machine

Small Auto Vaccum Carbon DC Sputter Coater

Parameter	Specification
Model Number	TMAX-BY-JS10
Vacuum Pump	Oil-required Rotary Vacuum Pump (Explicit oil filling needed)
Pumping Speed	50Hz: 16 m³/h (4.4 L/s) • 60Hz: 19.2 m³/h (5.2 L/s) • 20% speed boost at 60Hz
Ultimate Vacuum	2 Pa
Max Sputtering Current	1.6A
Operating Pressure Range	20 Pa – 8 Pa
Pump-Down Time	<5 min (to 2 Pa)
Vacuum Measurement Range	Atmospheric pressure to 2×10⁷ mbar
Gas Control System	Precision Gas Flow Controller
Chamber Specifications	Ø350 × 240mm (H) • Scratch-resistant quartz glass viewport
Target Specifications	Ø200mm • Materials: Au, Ag, Pt, Cu (noble/conductive metals)
Operation	Instruction manual guided
Dimensions/Weight	490(L) × 400(W) × 590(H) mm • 70 kg
Power Requirements	Dual-voltage: AC 110V/60Hz (Americas) or AC 220V/50Hz (Europe/Asia)
Power Consumption	<1500W
Warranty & Support	1-year limited warranty + lifetime technical support

Dual-Frequency Pumping: Automatically adapts to 50Hz/60Hz power grids (19.2 m³/h vs 16 m³/h) for global compatibility.
Scratch-Resistant Quartz Viewport: Ensures long-term visibility during deposition without degradation.
Oil-Lubricated Vacuum Pump: Delivers stable 2 Pa base pressure (vs. dry pumps), critical for consistent thin-film quality.

Broad Target Compatibility: Supports Au/Ag/Pt/Cu targets for conductive/noble metal coatings.
Rapid Process Setup: <5-minute pump-down enables efficient batch processing.