Deposition Equipment For Au, Ag, Al, Metal And Perovskite Films In  Solar, OLED & Semiconductor Applications

Deposition Equipment For Au, Ag, Al, Metal And Perovskite Films In  Solar, OLED & Semiconductor Applications

TMAX-PD-ZD02-Multi-Material Coater for Au, Ag, Al, Perovskite Films

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Product Overview
The TMAX-PD-ZD02 High-Vacuum Evaporation Coating System is designed for depositing high-quality metal, organic, and functional thin films, with broad applications in academic research (materials science, physics, chemistry, electronics, energy) and industrial R&D (OPV perovskite solar cells, semiconductors, OLED displays). It supports 4–6 evaporation sources (compatible with wire and boat configurations) and features a versatile design for both metal and organic material deposition (organic evaporation uses tungsten baskets/crucibles).

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Key Features

1. Precision & Stability

·Advanced evaporation power supply with constant current/power control, ensuring high process repeatability (±3%–5% uniformity).

·Programmable automation: One-touch start/stop and pre-set current/power parameters.

2. User-Friendly Operation

·PLC + touchscreen interface for intuitive control and high automation.

·Front-loading chamber (304 stainless steel, Ø260×H310 mm) with observation window for easy sample handling and maintenance.

3. Flexible Substrate & Source Options

·Adjustable substrate stage: Heated (0–300°C, ±1°C) or water-cooled, with rotational capability (0–30 RPM) and vertical adjustment (280–380 mm source-to-substrate distance).

·Multi-source compatibility: 4–6 sources for co-evaporation or sequential deposition, with anti-cross-contamination partitions.

4. High-Vacuum Performance

·Vacuum level: ≤5×10−5 Pa (base pressure); 

·leak rate ≤5×10⁻⁸ Pa·m³s.

·Fast pumping: Achieves 5×10⁻⁴ Pa in <30 min (1200 L/s molecular pump + rotary vane pump).

5. Versatile Applications

·Deposits metals (Au, Ag, Al, Cu, etc.), compounds (MoO³, LiF), and organic materials.

6. Ideal for multilayer films, electrodes, and SEM sample preparation.

Technical Specifications

Why Choose?

· Compact & Safe: Closed-frame design (0.7 m² footprint) with wheels for mobility.

· High Throughput: Processes up to 25 ITO/FTO glass slides (15–25 mm) per batch.

· Research-Grade: Supports OPV, OLED, and semiconductor R&D with industry-leading repeatability.

Ideal for: Universities, labs, and industries focused on advanced thin-film technologies.